FELMI, Graz University of Technology

The Institute for Electron Microscopy and Nanoanalysis (FELMI) of the Graz University of Technology (TU Graz) together with the Graz Center for Electron Microscopy (ZFE) represents the leading Austrian research institution in the field of advanced materials microscopy, analysis, and nanotechnology.

Advanced electron microscopy provides unique insights into the micro-and nano-world and is therefore an important prerequisite and essential key to innovations, especially in materials research and nanotechnology. Consequently, the institute concentrates its research activities on the development of new microscopic methods and their application to challenging themes in physics, chemistry, semiconductor and materials research and nanotechnology. Major areas of our research are:

  • Micro- and nanoanalysis of materials: Scanning electron microscopy, atomic force microscopy, Raman and infrared microscopy, transmission electron microscopy with the unique Austrian Scanning Transmission Electron Microscope (ASTEM) providing atomic resolution.
  • Nanofabrication of functional devices by means of focused ion and electron microscopy
  • 3D and in-situ characterization of materials and biomaterials

A unique feature of the institute is its broad field of activities ranging from fundamental research to teaching activities and service research for other institutes and industries.


The FELMI at TU Graz is the cooperation partner in iRel 4.0 for the development of device simulation and related dislocation failure modeling by high-resolution structural and chemical analysis using advanced electron microscopy techniques. Our instruments provide insights into the nanostructure of the corresponding devices down to the atomic length scale in order to characterize defects and interfaces. As the environment plays a significant role in failure mechanisms, we will make use of in-situ and in-operando investigations (heating, biasing) as a complement.

Key contribution

The FELMI at TU Graz will complement device simulation and dislocation failure modeling by providing high-resolution structural measurements and chemical analysis of corresponding devices that are necessary for the verification of the models generated by the partners. Furthermore, we will assist our partners in interface analysis and development of failure analysis methods by providing verification of structures via high-resolution, analytical scanning electron microscope investigations.

FELMI, Graz University of Technology

Steyrergasse 17
8010 Graz
Phone: +43 316 873 8323
E-Mail: werner.grogger@felmi-zfe.at